Affiliation:
1. Montana State University
Abstract
The +/−Z ferroelectric domains in periodically poled lithium niobate are characterized with Auger electron spectroscopy. The -Z domains have a higher Auger O-KLL transition amplitude than the +Z domains. Based on this, Auger electron spectroscopy mapping can be used on the O-KLL peak to image the +/-Z domain structure. This new characterization technique is confirmed with HF etching, and compared to SEM imaging. Spatial resolution down to 68 nm is demonstrated.
Funder
National Science Foundation
Subject
Electronic, Optical and Magnetic Materials