Integrated optical dual-cantilever arrays in silica on silicon
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Cantilever-like micromechanical sensors
2. Optical MEMS devices based on moving waveguides
3. ‘Living cantilever arrays’ for characterization of mass of single live cells in fluids
4. Polymeric micro-cantilever array for auditory front-end processing
5. A novel optical waveguide microcantilever sensor for the detection of nanomechanical forces
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1. Flexible photonics in low stiffness doped silica for use in fibre reinforced polymer composite materials;Optical Materials;2022-12
2. Photonics Integrated PiezoMEMS-PipMEMS: A Scalable Hybrid Platform for Next-Generation MEMS;IEEE Sensors Letters;2020-12
3. On-chip silicon photonics based grating assisted vibration sensor;Optics Express;2020-09-02
4. Electrothermal Actuators for SiO2 Photonic MEMS;Micromachines;2016-11-07
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