Contact optical nanolithography using nanoscale C-shaped apertures
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Plasmonic C-Shaped Structures and their Applications in Photonics and Biotechnology;Encyclopedia of Materials: Electronics;2023
2. High-Speed Parallel Plasmonic Direct-Writing Nanolithography Using Metasurface-Based Plasmonic Lens;Engineering;2021-11
3. Hybridized plasmonic modes and Fabry-Perot effect in nanoscale bowtie aperture waveguide;Optics Express;2019-06-04
4. Near field optical lithography using ultra-small gap bowtie apertures;9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology;2019-02-06
5. 16nm resolution lithography using ultra-small gap bowtie apertures;CLEO Pacific Rim Conference;2018
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