Measurement of acylindrical surface with transport of intensity equation

Abstract

High-precision aspherical cylindrical (acylindrical) lenses are difficult to directly measure because of the phase deviation in the off-axis region. To achieve rapid and non-contact measurement of the acylindrical lens surface, a novel optical structure phase measurement, to the best of our knowledge, is presented in this work. Both common finite-difference and noise-reduction finite-difference methods were used for solving the transport of intensity equation (TIE) for reconstruction of high-resolution surface measurement. The results suggest that both common finite-difference and noise-reduction finite-difference methods can obtain good measurement results. The proposed method allows for the direct measurement of surface information without interference stitching. The accuracy of the TIE measurement has been verified through direct contact measurement.