Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions-Reference-Cited by-同舟云学术

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Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions

Published:2005-10-10 Issue:29 Volume:44 Page:6093
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Schröder Sven,Gliech Stefan,Duparré Angela

Publisher

The Optical Society

Reference10 articles.

1. DUV scattering measurements as a tool for characterization of UV-optical surfaces

2. Development of optical coatings for 157-nm lithography II Reflectance, absorption, and scatter measurement

3. Light-scattering measurements of optical thin-film components at 157 and 193 nm

4. Description of an integrated scatter instrument for measuring scatter losses of 'superpolished' optical surfaces

5. Rayleigh scattering limits for low-level bidirectional reflectance distribution function measurements

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2. Scattering characteristics of various nodular defects in a dichroic beam splitter;Optics Express;2023-12-22

3. Optical Thin Films;Handbook of Thin Film Deposition;2018

4. Roughness and Scatter in Optical Coatings;Optical Characterization of Thin Solid Films;2018

5. Origins of light scattering from thin film coatings;Thin Solid Films;2015-10

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