In-situ photonic circuit field characterization in electronics-photonics CMOS platform via backside flip-chip near-field scanning optical microscopy

Abstract

We demonstrate device field c haracterization u sing N SOM c ollection a nd in-teraction measurement modes via the backside buried-oxide of large scale photonic circuits fabricated in monolithic electronics-photonics CMOS platforms (here a microdisk resonator) post-processed using flip-chip substrate-removal.