Author:
Zhang Yichi,Ravichandran Rijuta,Zhang Yujia,Ben Yoo S.J.
Abstract
We design, fabricate and characterize a 4-layer 110mm×44mm Si3N4 PIC with long routing waveguides and arrayed waveguides gratings based on a wafer-scale integration process for a high-resolution interferometric imager with 1200nm~1600nm bandwidth.