Author:
Arnold Kellen P.,Allen Joshua A.,Halimi Sami I.,Ryder Landen D.,Afzal Francis O.,Bian Yusheng,Aboketaf Abdelsalam,Hirokawa Takako,Dezfulian Kevin,Rakowski Michal,Augur Rod,Nummy Karen,Weiss Sharon M.
Abstract
We report scalable foundry fabrication and characterization of photonic crystal nanobeam waveguides incorporating subwavelength-scale dielectric antislot unit cells. This work enables enhanced light-matter interaction and three-fold improvement in VπL when incorporated in Mach-Zehnder modulators.