Phase-Change-Material Trimmed, Fixed-Wavelength Slow Wave Michelson Interferometer Sensors for Low-Cost Chem-Bio Sensing Applications

Abstract

We experimentally demonstrated compact Michelson interferometer sensors with slow wave enhanced phase sensitivity 277,750 rad/RIU-cm. We overcome fabrication imperfections by actively tuning interferometer fringes using phase change materials for fixed wavelength low-cost chem-bio sensors on-chip.