Author:
Chen Fu-Der,Wahn Hannes,Xue Tianyuan,Jung Youngho,Straguzzi John N.,Azadeh Saeed S.,Stalmashonak Andrei,Chua Hongyao,Luo Xianshu,Shah Prajay,Chameh Homeira Moradi,Lo Patrick Guo-Qiang,Valiante Taufik A.,Sacher Wesley D.,Poon Joyce K. S.
Abstract
We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.
Cited by
2 articles.
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