Low-loss and low wavelength-dependence vertical interlayer transition for 3D silicon photonics-Reference-Cited by-同舟云学术

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Low-loss and low wavelength-dependence vertical interlayer transition for 3D silicon photonics

Published:2015-07-09 Issue:14 Volume:23 Page:18602
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Takei Ryohei,Maegami Yuriko,Omoda Emiko,Sakakibara Youichi,Mori Masahiko,Kamei Toshihiro

Funder

Japan Society for the Promotion of Science London (JSPS)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference19 articles.

1. Three-dimensional integrated optics using polymers

2. 3-D photonic circuit technology

3. Scalable 3D dense integration of photonics on bulk silicon

4. Nanometer-scale thickness control of amorphous silicon using isotropic wet-etching and low loss wire waveguide fabrication with the etched material

5. Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry

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1. Photonic Chiplet Integration on Optical Interposer: Can Hybrid Bonding Realize Passive Optical Coupling?;2024 Photonics & Electromagnetics Research Symposium (PIERS);2024-04-21

2. High efficiency and compact vertical interlayer coupler for silicon nitride-on-silicon photonic platform;Optik;2023-03

3. Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line;Frontiers of Optoelectronics;2022-04-21

4. Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics;Photonics;2022-02-07

5. Asymmetric-ration optical power couplers based on nano-pixel structure;OSA Continuum;2021-02-01

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