Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference29 articles.
1. Soft x-ray multilayer monochromator with improved resolution and low specular background
2. Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator
3. High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime
4. High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
5. A 10,000 groove/mm multilayer coated grating for EUV spectroscopy
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