Affiliation:
1. University of Strathclyde
Abstract
We present the development and performance characterisation of a novel
structured illumination microscope (SIM) in which the grating pattern
is generated using two optical beams controlled via 2
micro-electro-mechanical system (MEMS) three-axis scanning
micromirrors. The implementation of MEMS micromirrors to accurately
and repeatably control angular, radial and phase positioning delivers
flexible control of the fluorescence excitation illumination, with
achromatic beam delivery through the same optical path, reduced
spatial footprint and cost-efficient integration being further
benefits. Our SIM architecture enables the direct implementation of
multi-color imaging in a compact and adaptable package. The
two-dimensional SIM system approach is enabled by a pair of 2 mm
aperture electrostatically actuated three-axis micromirrors having
static angular tilt motion along the x- and y-axes and static piston
motion along the z-axis. This allows precise angular, radial and phase
positioning of two optical beams, generating a fully controllable
spatial interference pattern at the focal plane by adjusting the
positions of the beam in the back-aperture of a microscope objective.
This MEMS-SIM system was applied to fluorescent bead samples and cell
specimens, and was able to obtain a variable lateral resolution
improvement between 1.3 and 1.8 times the diffraction limited
resolution.
Funder
Engineering and Physical Sciences
Research Council
Royal Academy of
Engineering
Subject
Atomic and Molecular Physics, and Optics,Biotechnology
Cited by
3 articles.
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