Separation of misalignment aberrations in interferometric testing for the surface measurement of the frustum of a cone
Author:
Funder
National Key R&D Program of China
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference14 articles.
1. Comparison between a white-light interferometer and a tactile formtester for the measurement of long inner cylindrical surfaces
2. Optical roughness measurements using extended white-light interferometry
3. New design techniques and calibration methods for CGH-null testing of aspheric surfaces
4. Absolute interferometric test of aspheres by use of twin computer-generated holograms
5. A white-light interferometer for inner cylindrical surfaces
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Calibrating CGH Substrate TWE and Simulating Adjustment Error in Cylindrical Surface Measurement;IEEE Photonics Journal;2022-06
2. Absolute calibration of smooth surface and cylindrical surface measurement;Optical Metrology and Inspection for Industrial Applications VIII;2021-10-09
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