Author:
Ahmadzadeh Sam,Gibson Des,Fleming Lewis,Hutson David,Mcgann Greg,Song Shigeng,Belke Ameen,James Allan,Wells Stephen,Forsyth Alan,Bruckshaw Suzanne
Abstract
Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.
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1 articles.
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