Abstract
State of the art of PVD coating equipment for mass production in Asia were described in this paper. Evaporation, ion assisted deposition, ion beam sputtering, magnetron sputtering and atomic layer deposition coating tools were introduced based on different application and market segments.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献