Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement-Reference-Cited by-同舟云学术

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Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement

Published:2020-01-28 Issue:4 Volume:59 Page:1082
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Huang Yiliang,Gao Jian,Zhang Lanyu,Deng Haixiang,Chen Xin

Funder

National Natural Science Foundation of China

Guangdong Provincial Applied Science and Technology Research and Development Program

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference21 articles.

1. Stroboscopic white-light interferometry of vibrating microstructures

2. High-speed noncontact profiler based on scanning white-light interferometry

3. Characterization of micromechanical structures using white-light interferometry

4. Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

5. Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry–Perot interferometers

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1. Noise analysis and correction on carrier phase in coherence scanning interferometry for high accuracy surface topography measurements;Measurement;2025-01

2. Improved symplectic geometry mode decomposition based correlation method in white light scanning interferometry;Optics and Lasers in Engineering;2024-11

3. Design and implementation of a precision levelling composite stage with active passive vibration isolation;Robotics and Computer-Integrated Manufacturing;2024-10

4. High-speed lateral scanning white-light phase shift interferometry;Optics Express;2024-06-11

5. Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective;Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems;2024-04-30

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