Facile fabrication of THz metasurfaces by a spatially shaped femtosecond laser printing system

Abstract

Terahertz (THz) metasurfaces provide unprecedented abilities to realize versatile THz wavefronts manipulations. Nevertheless, these high degree of freedom, non-periodic, densely arranged subwavelength unit cells pose numerous extreme parameter requirements for the fabrication of metasurfaces, presenting significant challenges to their practical application. Herein, a spatial shaping femtosecond laser printing system, based on spatial light modulation (SLM), is proposed for the creation of THz metasurfaces. Through programming the SLM with a sequence of computer-generated holograms (CGH) corresponding to C-shaped Bessel beams with varying opening angles and orientation angles, the C-shaped slit resonant rings with different geometric parameters—fundamental units of the metasurface—were precisely printed onto a gold film. To validate this technique, a THz metalens based on a phased gradient design and a THz holographic plate employing simultaneous phase and amplitude modulation were meticulously fabricated, displaying outstanding performance. Owing to the simple processing flow, high reproducibility, and wide applicability of materials, this technique stands out as a versatile and efficient approach for fabricating THz metasurfaces, with the potential to promote the commercialization of terahertz metasurfaces.