Precise localized thinning and vertical taper fabrication for silicon photonics using a modified local oxidation of silicon (LOCOS) fabrication process-Reference-Cited by-同舟云学术

Precise localized thinning and vertical taper fabrication for silicon photonics using a modified local oxidation of silicon (LOCOS) fabrication process

Published:2015-02-11 Issue:4 Volume:23 Page:4377
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Beaudin Guillaume,Belarouci Ali,Aimez Vincent

Funder

NSERC-Si-EPIC program

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference8 articles.

1. Ultra-low-energy all-CMOS modulator integrated with driver

2. A tunable 1x4 silicon CMOS photonic wavelength multiplexer/demultiplexer for dense optical interconnects

3. Silicon Photonic Integration Platform—Have We Found the Sweet Spot?

4. High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay

5. A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices

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