Multi-view stitching phase measuring deflectometry for freeform specular surface metrology

Abstract

Phase measuring deflectometry (PMD) offers notable advantages for precision inspection of specular elements. Nevertheless, if confronts challenges when measuring freeform specular surfaces due to the dispersion of reflection rays from surfaces with high local slopes. Here, we propose a multi-view stitching PMD. It utilizes distinct sensors combining with a screen to capture the appearance of each region. After precisely calibrating the entire system to correct the absolute depth of each region, the appearances of all regions are precisely stitched together, reconstructing the comprehensive appearance of the surface. Through experimental setup, we measured the 3D morphology of a spherical lens with a curvature radius of 155.04 mm and a peak-to-valley (PV) value of 2.9 mm, which yielded a measurement accuracy of 5.3 µm (relative error: 0.18 %). Furthermore, we successfully measured the appearance of a curved mobile phone screen with local slopes ranging from −46.1° to 51.3°, and freeform acrylic sheet with local slopes ranging from −6.7° to 7.7° and a PV value of 5.3 mm.