Rapid and precise characterization of sub-µm surface defects using laser scatterometer devising a polygonal-shaped waveguide with double-slit aperture-Reference-Cited by-同舟云学术

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Rapid and precise characterization of sub-µm surface defects using laser scatterometer devising a polygonal-shaped waveguide with double-slit aperture

Published:2019-12-04 Issue:25 Volume:27 Page:36923
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Dung Vu Tien,Kim Hyunchul,Lee Joohyung^ORCID

Funder

Ministry of Environment

National Research Foundation of Korea

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference13 articles.

1. Removal of scratch on the surface of MgO single crystal substrate in chemical mechanical polishing process

2. Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers

3. Direct Identification of Surface Defects and Their Influence on the Optical Characteristics of Upconversion Nanoparticles

4. Quantitative evaluation of scratch visibility resistance of polymers

5. Automated visual inspection in the semiconductor industry: A survey

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Impact of mirror local defects on system scattering in telescopes;Results in Physics;2024-01

2. Study on scattering light field distribution of optical element in-surface defects based on Mueller matrix;AIP Advances;2021-11-01

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