Comparison of three focus sensors for optical topography measurement of rough surfaces-Reference-Cited by-同舟云学术

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Comparison of three focus sensors for optical topography measurement of rough surfaces

Published:2019-10-31 Issue:23 Volume:27 Page:33459
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Šarbort Martin,Holá Miroslava,Pavelka Jan,Schovánek Petr,Řeřucha Šimon,Oulehla Jindřich,Fořt Tomáš,Lazar Josef

Funder

Ministerstvo Školství, Mládeže a Tělovýchovy

Technology Agency of the Czech Republic

Akademie Věd České Republiky

European Commission

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference20 articles.

1. Principles of interference microscopy for the measurement of surface topography

2. White light interferometry

3. Characterization of surface topography by confocal microscopy: I. Principles and the measurement system

4. Real-time structured light profilometry: a review

5. Principles and techniques of digital holographic microscopy

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1. Feature-Based Characterisation of Turned Surface Topography with Suppression of High-Frequency Measurement Errors;Sensors;2022-12-08

2. Advances in Measurement and Data Analysis of Surfaces with Functionalized Coatings;Coatings;2022-09-13

3. Proposals of Frequency-Based and Direction Methods to Reduce the Influence of Surface Topography Measurement Errors;Coatings;2022-05-25

4. Selection of Methods of Surface Texture Characterisation for Reduction of the Frequency-Based Errors in the Measurement and Data Analysis Processes;Sensors;2022-01-20

5. Spin-Orbital Conversion of a Strongly Focused Light Wave with High-Order Cylindrical–Circular Polarization;Sensors;2021-09-26

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