Affiliation:
1. Nanjing University of Posts and Telecommunications
2. Suzhou Lighting Chip Monolithic Optoelectronics Technology Co. Ltd.
Abstract
InGaN/GaN multiple quantum well (MQW) diodes perform multiple functions, such as optical emission, modulation and reception. In particular, the partially overlapping spectral region between the electroluminescence (EL) and responsivity spectra of each diode results in each diode being able to sense light from another diode of the same MQW structure. Here, we present a noncontact, optical proximity sensing system by integrating an MQW-based light transmitter and detector into a tiny GaN-on-sapphire chip. Changes in the external environment modulate the light emitted from the transmitter. Reflected light is received by the on-chip MQW detector, wherein the carried external modulation information is converted into electrical signals that can be extracted. The maximum detection proximity is approximately 17 mm, and the displacement detection accuracy is within 1 mm. Based on the detection of distance, we extend the application of the sensor to vibration and pressure detection. This monolithic integration design can replace external discrete light transmitter and detector systems to miniaturize reflective sensor architectures, enabling the development of novel optical sensors.
Funder
Postgraduate Research & Practice Innovation Program of Jiangsu Province
Natural Science Research of Jiangsu Higher Education Institutions of China
National Natural Science Foundation of China
National Key Research and Development Program of China
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献