Enlightening darkness to diffraction limit and beyond: comparison and optimization of different polarizations for dark spot generation
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Sharper Focus for a Radially Polarized Light Beam
2. Smallest lithographic marks generated by optical focusing systems
3. Sharper focal spot formed by higher-order radially polarized laser beams
4. Toward the subdiffraction focusing limit of optical superresolution
5. Effect of radial polarization and apodization on spot size under tight focusing conditions
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