Groove profile modification of blazed gratings by dip coating with hardenable liquids
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Publisher
The Optical Society
Reference13 articles.
1. Multilayer-coated blazed grating performance in the soft x-ray region
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3. On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136–142-Å wavelength region and near normal incidence
4. Multilayer‐coated echelle gratings for soft x rays and extreme ultraviolet
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3. Development of low blaze angle gratings for ALS-U;Advances in X-Ray/EUV Optics and Components XV;2020-08-21
4. Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist;SPIE Proceedings;2013-12-21
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