Abstract
For a line-of-sight coating uniformity model, the source distribution is
normalized such that all material can be traced. This is validated for a
point source in an empty coating chamber. We can now quantify the source
utilization of a coating geometry to determine what fraction of the
evaporated source material is collected on the optics of interest. For the
example of a planetary motion system, we calculate this utilization and
two nonuniformity parameters for a large range of two input parameters,
here the distance between the source and the rotary drive system and the
lateral displacement of the source from the machine centerline. Contour
plot visualizations in this 2D parameter space assist understanding
geometry trade-offs.
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering