Hybrid lithography: Combining UV-exposure and two photon direct laser writing
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Investigation of gray-scale technology for large area 3D silicon MEMS structures
2. Recent developments in deep x-ray lithography
3. Properties of Three-Dimensional Precision Objects Fabricated by Using Laser Based Micro Stereo Lithography
4. Rapid prototyping of small size objects
5. 3D microfabrication by combining microstereolithography and thick resist UV lithography
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