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Fabrication of a concave grating with a large line spacing via a novel dual-beam interference lithography method

  • Published:2016-05-09 Issue:10 Volume:24 Page:10759
  • ISSN:1094-4087
  • Container-title:Optics Express
  • language:en
  • Short-container-title:Opt. Express

Author:

Li Xinghui,Ni Kai,Zhou Qian,Wang Xiaohao,Tian Rui,Pang Jinchao

Funder

China Postdoctoral Science Foundation Funded Project

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review: High-Precision Angle Measurement Technologies;Sensors;2024-03-08

2. Fabrication of a micro lens array-grating for a miniature spectrometer;Optical Design and Testing XII;2022-12-21

3. Instantaneous grating signal subdivision system with non-linear Kalman filters;Optical Design and Testing XII;2022-12-21

4. A polarization adjustment module for frequency aliasing of heterodyne grating interferometer;Optical Metrology and Inspection for Industrial Applications IX;2022-12-19

5. An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors;Optical Metrology and Inspection for Industrial Applications IX;2022-12-19
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