Image field distribution model of wavefront aberration and models of distortion and field curvature
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Double Zernike expansion of the optical aberration function
2. Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment
3. Aberrations of perturbed and unobscured optical systems
4. Optimum position and minimum number of field-of-view points for optical system wavefont comprehension
5. Orthogonal Aberration Functions for Microlithographic Optics
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fast reconstruction of the aberrated scanning lithographic image by a quadratic imaging model and an integral transfer function;Applied Optics;2020-05-18
2. In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method;Applied Optics;2019-05-20
3. Camera calibration based on the principal rays model of imaging optical systems;Journal of the Optical Society of America A;2017-03-28
4. Wavefront aberration function in terms of R V Shack’s vector product and Zernike polynomial vectors;Journal of the Optical Society of America A;2015-09-16
5. Double Zernike expansion of the optical aberration function from its power series expansion;Journal of the Optical Society of America A;2013-05-28
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