Spherical coupling probe for measuring inner dimensions of microstructures
Author:
Funder
National Natural Science Foundation of China (NSFC)
Youth Talents Foundation of Harbin
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference19 articles.
1. A high precision micro/nano CMM using piezoresistive tactile probes
2. A Three-Dimensional Resonant Triggering Probe for Micro-CMM
3. Development of a High-Precision Touch-Trigger Probe Using a Single Sensor
4. Tactile–optical probes for three-dimensional microparts
5. Development of a virtual probe tip with an application to high aspect ratio microscale features
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1. Large-range and high-sensitivity displacement sensing based on a SNAP microresonator by multimode encoding technique;Measurement Science and Technology;2023-06-21
2. Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review;Metrology;2023-04-17
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