Reduction of buried microstructure diffraction in fabricating curved microstructure by multiple exposure method-Reference-Cited by-同舟云学术

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Reduction of buried microstructure diffraction in fabricating curved microstructure by multiple exposure method

Published:2018-11-12 Issue:24 Volume:26 Page:31085
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Luo Ningning,Xu Guanying,Zhang Zhimin,Zhang Weiwei

Funder

Aeronautical Science Foundation of China

National Natural Science Foundation of China (NSFC)

Natural Science Foundation Jiangxi Provincial Department of Education

Natural Science Foundation of Jiangxi Province

Program for Supporting Young Scientists of Jiangxi Province

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference22 articles.

1. Direct fabrication of compound-eye microlens array on curved surfaces by a facile femtosecond laser enhanced wet etching process

2. Direct laser writing for micro-optical devices using a negative photoresist

3. Three-dimensional microfabrication using local electrophoresis deposition and a laser trapping technique

4. Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

5. A microlens array on curved substrates by 3D micro projection and reflow process

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1. Rapid fabrication of grating of variable submicron line width based on digital micromirror devices collaborative modulation lithography;Optical Engineering;2024-08-09

2. Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation;Journal of Micromechanics and Microengineering;2024-06-28

3. Rapid fabrication of sub-micron scale functional optical microstructures on the optical fiber end faces by DMD-based lithography;Optics Express;2021-12-24

4. A DMD based UV lithography method with improved dynamical modulation range for the fabrication of curved microstructures;AIP Advances;2021-04-01

5. Tradeoff Control of Multi-exposure Lithography for SU-8 Photochemical Reaction Channel Formation;BioChip Journal;2020-10-27

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