Author:
Wang Shuqi,Li Shuangluan,Zhou Yuanguo,Huang Jianping,Ren Qiang,Zhuo Jianming,Cai Yijun
Funder
Opening Project of Key Laboratory of Microelectronic Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences
Natural Science Basic Research Plan in Shaanxi Province of China
Open Fund Project of Key Laboratory of Modern Precision Measurement and Laser Nondestructive Detection
National Natural Science Foundation of China
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献