EUV Bragg reflectors with photonic superlattices
Author:
Funder
Austrian Science Fund (FWF)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference25 articles.
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2. Graded Multilayer Film Design Method of Anamorphic Magnification Extreme Ultraviolet Lithography Objective System;Acta Optica Sinica;2020
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