Accurate mechanical–optical theoretical model of cross-axis sensitivity of an interferometric micro-optomechanical accelerometer
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Published:2022-04-07
Issue:11
Volume:61
Page:3201
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ISSN:1559-128X
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Container-title:Applied Optics
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language:en
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Short-container-title:Appl. Opt.
Author:
Fang Weidong1,
Zhu Qixuan2,
Bai Jian1,
Chen Jiaxiao1,
Xv Xiang1,
Wang Chen3,
Lu Qianbo2ORCID
Affiliation:
1. Zhejiang University
2. Northwestern Polytechnical University
3. University of Liege
Abstract
An interferometric micro-optomechanical accelerometer usually has ultrahigh sensitivity and accuracy. However, cross-axis interference inevitably degrades the performance, including its detection accuracy and output signal contrast. To accurately clarify the influence of cross-axis interference, a modified mechanical–optical theoretical model is established. The rotation of the proof mass and the detected light intensity are quantitatively investigated with a load of cross-axis acceleration. A simulation and experiment are performed to verify the correctness of the theoretical model when the cross-axis acceleration is from 0 to 0.175 g. The results demonstrate that this model has a more than fivefold accuracy increase compared with conventional theoretical models when the cross-axis acceleration is from 0.06 to 0.175 g. In addition, we provide a suppression method to diminish the rotation of the proof mass based on squeeze film air damping, which significantly suppresses the contrast reduction caused by cross-axis interference.
Funder
National Postdoctoral Program for Innovative Talents
Natural Science Basic Research Program of Shaanxi Province
Fundamental Research Funds for the Central Universities
National Natural Science Foundation of China
Natural Science Foundation of Ningbo
Publisher
Optica Publishing Group
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
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