Laser adaptive processing technology for multilayer dissimilar materials

Abstract

We report a laser adaptive processing technology (LAPT) for the selective removal of Cu/Al multilayer dissimilar materials. Using the wavelength range and intensity distribution of the characteristic spectrum, the properties and content of multilayer dissimilar materials can be analyzed online based on laser-induced breakdown spectroscopy. The traditional low-speed spectral detection mode was transformed into a high-speed photoelectric detection method by using a scheme consisting of a bandpass filter with an avalanche photodetector (APD), and the in situ online detection of a 30 ns, 40 kHz high-frequency pulse signal during laser scanning was realized. Combined with a field programmable gate array (FPGA) digital control unit, online feedback and closed-loop control were achieved at the kHz level, and the adaptive intelligent control of material interfaces and laser processing parameters was achieved. This excellently demonstrated the feasibility and flexibility of LAPT for processing arbitrary multilayer dissimilar materials.