Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique-Reference-Cited by-同舟云学术

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Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique

Published:2017-08-31 Issue:18 Volume:25 Page:21958
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Chen Ronghuan,Liu Hua,Zhang Haolin,Zhang Wenjuan,Xu Jia,Xu Wenbin,Li Jinhuan

Funder

Natural Science Foundation of Jilin Province

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference18 articles.

1. Plasmon resonances of Ag capped Si nanopillars fabricated using mask-less lithography

2. Arbitrary photo-patterning in liquid crystal alignments using DMD based lithography system

3. Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels

4. Fine-tuned grayscale optofluidic maskless lithography for three-dimensional freeform shape microstructure fabrication

5. Continuous-flow lithography for high-throughput microparticle synthesis

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1. Rapid fabrication of grating of variable submicron line width based on digital micromirror devices collaborative modulation lithography;Optical Engineering;2024-08-09

2. Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation;Journal of Micromechanics and Microengineering;2024-06-28

3. Image Accuracy Optimization Method for Maskless Lithography Based on DMD (Invited);CHIN J LASERS;2024

4. Aberration Correction and Speckle Noise Reduction in Image Minified Lensless Holographic Projection Based on Digital Micro-Mirror Device;IEEE Photonics Journal;2024-02

5. Edge smoothing optimization method in DMD digital lithography system based on dynamic blur matching pixel overlap technique;Optics Express;2024-01-05

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