Affiliation:
1. School of Information Science and Technology, Fudan University
Abstract
The non-null test to detect the modulated wavefront is a widely used method in optical freeform surface measurement. In this study, the wavefront deformation in the non-null test of an optical freeform surface measurement was corrected based on the wavefront propagation model to improve measurement accuracy. A freeform surface wavefront correction (FSWC) measurement system was established to validate the proposed method. Simulation and experimental studies indicated that the proposed method can reduce the influence of freeform surface wavefront deformation in space propagation. Moreover, the freeform surface form accuracy measured by FSWC can reach a root-mean-squared value of 10 nm.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Science and Technology Commission of Shanghai Municipality
Subject
Atomic and Molecular Physics, and Optics
Cited by
6 articles.
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