Phase-resolved all-fiber reflection-based s-NSOM for on-chip characterization

Abstract

We report on a phase-resolved, reflection-based, scattering-type near-field scanning optical microscope technique with a convenient all-fiber configuration. Exploiting the flexible positioning of the near-field probe, our technique renders a heterodyne detection for phase measurement and point-to-point frequency-domain reflectometry for group index and loss measurement of waveguides on a chip. The important issue of mitigating the measurement errors due to environmental fluctuations along fiber-optic links has been addressed. We perform systematic measurements on different types of silicon waveguides which demonstrate the accuracy and precision of the technique. With a phase compensation approach on the basis of a common-path interferometer, the phase drift error is suppressed to ∼ 0.013°/s. In addition, characterizations of group index, group velocity dispersion, propagation loss, insertion loss, and return loss of component waveguides on a chip are all demonstrated. The measurement accuracy of the propagation loss of a ∼ 0.2 cm long nano-waveguide reaches ±1 dB/cm. Our convenient and versatile near-field characterization technique paves the way for in-detail study of complex photonic circuits on a chip.