Surface third and fifth harmonic generation at crystalline Si for non-invasive inspection of Si wafer’s inter-layer defects
Author:
Funder
National Research Foundation of Korea (NRF)
National Research Foundation Singapore (NRF)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
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1. Three-dimensional integration of nanotechnologies for computing and data storage on a single chip
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