Dual differential confocal method for surface profile measurement with a large sensing measurement range-Reference-Cited by-同舟云学术

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Dual differential confocal method for surface profile measurement with a large sensing measurement range

Published:2020-01-14 Issue:3 Volume:59 Page:614
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Shao Rongjun,Zhao Weiqian,Qiu Lirong,Wang Yun,Zhang Ruirui,Zhang Chenglong

Funder

National Key R&D Program of China

National Natural Science Foundation of China

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference26 articles.

1. Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

2. Effect of manufacturing defects on optical performance of discontinuous freeform lenses

3. Optical inspection of solar cells using phase-sensitive optical coherence tomography

4. Spectral domain phase microscopy for local measurements of cytoskeletal rheology in single cells

5. Stroboscopic supercontinuum white-light interferometer for MEMS characterization

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1. Axial Range Expansion Method for Multi-Differential Confocal Three-Dimensional Imaging;IEEE Photonics Technology Letters;2024-02-15

2. Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes;International Journal of Precision Engineering and Manufacturing;2023-06-27

3. Differential confocal measurement of microstructure surface topography based on centering error optimization and wavelet threshold denoising;Optics & Laser Technology;2023-05

4. Large range nano autofocus method based on differential centroid technique;Optics & Laser Technology;2023-04

5. An Autofocus Method Based on Improved Differential Confocal Microscopy in Two-Photon Lithography;Photonics;2023-03-21

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