Dynamics of a micro-electro-mechanical system associated with an atomic force microscope considering squeeze film damping
Author:
Funder
Universidad Tecnológica de Pereira
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference11 articles.
1. Surface deformation and friction characteristic of nano scratch at ductile-removal regime for optical glass BK7
2. Influence of strain rate effect on material removal and deformation mechanism based on ductile nanoscratch tests of Lu2O3 single crystal
3. Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope
4. Electrode-Free Anodic Oxidation Nanolithography of Low-Dimensional Materials
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Squeeze Film Damping Effect on Different Microcantilever Probes in Tapping Mode Atomic Force Microscope;Scanning;2020-11-13
2. Optics theory and practice in Iberoamerica: introduction to the feature issue;Applied Optics;2020-05-01
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