Fabrication of a concave grating with a large line spacing via a novel dual-beam interference lithography method

Author:

Li Xinghui,Ni Kai,Zhou Qian,Wang Xiaohao,Tian Rui,Pang Jinchao

Funder

China Postdoctoral Science Foundation Funded Project

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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