Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad
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Published:2011-09-16
Issue:27
Volume:50
Page:5321
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ISSN:0003-6935
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Container-title:Applied Optics
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language:en
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Short-container-title:Appl. Opt.
Author:
Wu Tong,Hane Kazuhiro
Publisher
The Optical Society
Cited by
2 articles.
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