Resolution-enhanced heterodyne laser interferometer with differential configuration for roll angle measurement
Author:
Funder
National Natural Science Foundation of China (NSFC)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference28 articles.
1. High resolution heterodyne interferometer without detectable periodic nonlinearity
2. Development of a laser synthetic wavelength interferometer for large displacement measurement with nanometer accuracy
3. Measurement of straightness without Abbe error using an enhanced differential plane mirror interferometer
4. A calibrator based on the use of low-coherent light source straightness interferometer and compensation method
5. Laser heterodyne interferometer for simultaneous measuring displacement and angle based on the Faraday effect
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