Affiliation:
1. University of Chinese Academy of Sciences
2. CAS Center for Excellence in Superconducting Electronics
3. Hainan University
Abstract
The effective and convenient detection of single photons via advanced detectors with a large active area is becoming significant for quantum and classical applications. This work demonstrates the fabrication of a superconducting microstrip single-photon detector (SMSPD) with a millimeter-scale active area via the use of ultraviolet (UV) photolithography. The performances of NbN SMSPDs with different active areas and strip widths are characterized. SMSPDs fabricated by UV photolithography and electron beam lithography with small active areas are also compared from the aspects of the switching current density and line edge roughness. Furthermore, an SMSPD with an active area of 1 mm × 1 mm is obtained via UV photolithography, and during operation at 0.85 K, it exhibits near-saturated internal detection efficiency at wavelengths up to 800 nm. At a wavelength of 1550 nm, the detector exhibits a system detection efficiency of ∼5% (7%) and a timing jitter of 102 (144) ps, when illuminated with a light spot of ∼18 (600) µm in diameter, respectively.
Funder
Youth Innovation Promotion Association of the Chinese Academy of Sciences
Science and Technology Commission of Shanghai Municipality
National Key Research and Development Program of China
National Natural Science Foundation of China
Subject
Atomic and Molecular Physics, and Optics
Cited by
1 articles.
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