Affiliation:
1. University of Stuttgart
Abstract
We demonstrate 3D printed aspherical singlet and doublet microoptical components by grayscale lithography and characterize and evaluate their excellent shape accuracy and optical performance. The typical two-photon polymerization (2PP) 3D printing process creates steps in the structure which is undesired for optical surfaces. We utilize two-photon grayscale lithography (2GL) to create step-free lenses. To showcase the 2GL process, the focusing ability of a spherical and aspherical singlet lens are compared. The surface deviations of the aspherical lens are minimized by an iterative design process and no distinct steps can be measured via confocal microscopy. We design, print, and optimize an air-spaced doublet lens with a diameter of 300 µm. After optimization, the residual shape deviation is less than 100 nm for the top lens and 20 nm for the bottom lens of the doublet. We examine the optical performance with an USAF 1951 resolution test chart to find a resolution of 645 lp/mm.
Funder
Carl-Zeiss-Stiftung
Baden-Württemberg Stiftung
Ministerium für Wissenschaft, Forschung und Kunst Baden-Württemberg
Bundesministerium für Bildung und Forschung
Deutsche Forschungsgemeinschaft
HORIZON EUROPE European Research Council
Subject
Atomic and Molecular Physics, and Optics
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献