Fabrication of low-stray-light gratings by broad-beam scanning exposure in the direction perpendicular to the grating grooves
Author:
Funder
National Natural Science Foundation of China (NSFC)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference12 articles.
1. Scattered-light properties of diffraction gratings
2. Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask
3. Technological problems in holographic recording of plane gratings
4. Fabrication of nanoscale gratings with reduced line edge roughness using nanoimprint lithography
5. Heat treatment for reduction of surface roughness on holographic gratings
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