Enhancement of the steepness measurement of a film thickness edge using wavelet transforms with fringe thinning
Author:
Publisher
The Optical Society
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Steep large film thickness measurement with off-axis terahertz digital holography reconstructed by a direct Fourier and Hermite polynomial
2. Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry
3. Single-shot, dual-wavelength digital holography based on polarizing separation
4. Real-time dual-wavelength digital holographic microscopy based on polarizing separation
5. A comparison of digital holographic microscopy and on-axis phase-shifting interferometry for surface profiling
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