Measurement of surface position by focusing an interference pattern of multiple apertures with a confocal system-Reference-Cited by-同舟云学术

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Measurement of surface position by focusing an interference pattern of multiple apertures with a confocal system

Published:2018-01-18 Issue:3 Volume:57 Page:498
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Rueda Santiago^ORCID,Mejía Yobani^ORCID

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference14 articles.

1. Confocal optical microscopy

2. Axial irradiance and optimum focusing of laser beams

3. Surface profilers, multiple wavelength, and white light interferometry;SchmitMalacara,2007

4. Optical Coherence Tomography

5. Foundations of confocal scanned imaging in light microscopy;InouéPawley,2006

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