Affiliation:
1. Shandong Youth University of Political Science
Abstract
The hybridization of mono-crystalline silicon and lithium niobate thin films (Si-LNOI) combines the excellent electrical properties and mature micro-nano processing technology of Si, as well as the remarkable optical properties of LN. The Si-LNOI platform will drive new and promising integrated photonics devices. High-efficiency fiber-waveguide optical coupling is necessary to realize the full potential of devices and practical applications. In this study, a spot-size converter (SSC) was designed and demonstrated for efficient edge coupling between a Si-LNOI waveguide and lens fiber. The SSC was fabricated by standard semiconductor process, which consisted of an inverted-tapered Si and a silicon-rich nitride (SRN) waveguide overlying the inverted-tapered Si. At a wavelength of 1550 nm, the TE and TM light achieved coupling losses of 1.9 and 2.1 dB/facet, respectively. The coupling efficiency was stable in the wavelength range of 1500–1600 nm. The tolerance of alignment was also evaluated.
Funder
National Key Research and Development Program of China
Natural Science Foundation of Shandong Province
Subject
Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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